Senwaiy Tech Solutions Pte Ltd
Engineering in Bukit Batok

Today, there are more than dozen of Dry Pump equipment manufacturers in the market. Some of them even having different format of communication protocols for different models. In order for the facility department to be able to conform to the requirements of processing capabilities or the demand of temporarily PM works. These Dry Pumps are required to be able to moved\ around constantly. This poses a big challenge for the manufacturer if they are to achieve the requirement of getting their data uploaded within minutes so as not to affect the machine production schedule" they are required to be able to shift the Pump location at any time, and having to achieve the requirement of getting data uploaded within minutes in order not to affect the machine production schedule.
It is impossible for all these devices to be in compliance with SEMI E54 standard. This means there will be dozens of equipment manufacturers with different communications protocols that have to be considered for integration. The Dry Pump devices are no exceptions as there are many different suppliers.
Clean room Dry Pump and Scrubber integration solutions
Dry Pump data/information collection problems
For all Foundry, IDM or DRAM manufacturer, yield rate of every Wafer, Cassette and Lot, which produced under certain Recipe, are required to be analysis and measured with the accuracy of up to few decimal points on percentage. As such, APC department will have to handle thousands of integration combination with the situation of having different devices (controllers) with different communication protocol standards, such as DCS, PLC, I/O Module and Ultra Sensor, etc..
Prior to this, the CMS systems for equipment like Dry Pump are provided by the Equipment manufacturers. Every vendor has their own communication interface and protocol. The provided CMS systems were just like isolated islands of automationwhich totally can’t communicate with each other. This situation results：
The personne